发明名称 DEVICE AND METHOD FOR DATA EDITING AND FOR MANUFACTURING SEMICONDUCTOR
摘要 PROBLEM TO BE SOLVED: To edit a recipe while grasping the common use relation among recipes and small recipes. SOLUTION: The data editing device edits data in such a structure that a master recipe consists of data items and also has small recipes as data items capable of having substantial data and pointers or names for referring the substantial data, and a plurality of master recipes can share the data of the small recipes; and the held data of the master recipes are arrayed and displayed, and an input instruction is rewritten while the array display picture is displayed.
申请公布号 JP2002373836(A) 申请公布日期 2002.12.26
申请号 JP20010181843 申请日期 2001.06.15
申请人 CANON INC 发明人 KOJIMA YUJI
分类号 H01L21/027;H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/027
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