发明名称 |
Synthesis of layers, coatings or films using precursor layer exerted pressure containment |
摘要 |
Systems and methods are described for synthesis of films, coatings or layers using precursor exerted pressure containment. A method includes exerting a pressure between a first precursor layer that is coupled to a first substrate and a second precursor layer that is coupled to a second substrate; forming a composition layer; and moving the first substrate relative to the second substrate, wherein the composition layer remains coupled to the second substrate.
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申请公布号 |
US6500733(B1) |
申请公布日期 |
2002.12.31 |
申请号 |
US20010957132 |
申请日期 |
2001.09.20 |
申请人 |
HELIOVOLT CORPORATION |
发明人 |
STANBERY BILLY J. |
分类号 |
C23C14/00;C23C14/58;C23C26/00;H01L31/032;H01L31/0336;H01L31/18;(IPC1-7):H01L21/30;H01L21/46;H01L21/31;H01L21/469;B32B31/00 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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