发明名称 Synthesis of layers, coatings or films using precursor layer exerted pressure containment
摘要 Systems and methods are described for synthesis of films, coatings or layers using precursor exerted pressure containment. A method includes exerting a pressure between a first precursor layer that is coupled to a first substrate and a second precursor layer that is coupled to a second substrate; forming a composition layer; and moving the first substrate relative to the second substrate, wherein the composition layer remains coupled to the second substrate.
申请公布号 US6500733(B1) 申请公布日期 2002.12.31
申请号 US20010957132 申请日期 2001.09.20
申请人 HELIOVOLT CORPORATION 发明人 STANBERY BILLY J.
分类号 C23C14/00;C23C14/58;C23C26/00;H01L31/032;H01L31/0336;H01L31/18;(IPC1-7):H01L21/30;H01L21/46;H01L21/31;H01L21/469;B32B31/00 主分类号 C23C14/00
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