ACCELERATION SENSOR AND METHOD OF MANUFACTURE THEREOF

摘要

The invention provides a low−cost,small and lightweight acceleration sensor,and a method of manufacture thereof.A sensor(17)is provided on a base(11)and sealed with a cap(13)attached by eutectic welding to a frame(19)of the base(11).The cap(13)includes a cap body(13a)formed of a conductive semiconductor material,and a metal film 13 provided on the border of the cap body(13a).The frame(19)includes a frame body(19a)formed of doped polysilicon,a diffusion prevention film(19b)provided selectively on the frame body(19a),and a junction layer(19c).The junction layer(19c)includes a conductive part formed of a conductive material,and a junction part formed of a semiconductor.