STAGE DEVICE AND ALIGNER

摘要

PROBLEM TO BE SOLVED: To provide a stage device which can move two stages by foot print, whose degree is similar to the stage device of single-stage type. SOLUTION: A first stage ST1 supporting a first table TB1 via a first micro drive device is driven by a first drive device in the direction of an X-axis, in a state where one side is supported by a first guide bar 46. A second stage AST2, supporting a second table TB2, is driven by a second drive device in the direction of the X-axis in a state where one side is supported by a second guide bar 48. The first guide bar and the second guide bar are driven independently by a Y-axis linear motor in the direction of an Y-axis. When the first guide bar and the second guide bar are brought closest, an end part on the opposite side of the side supported by the guide bar of one stage is positioned above the other guide bar.