| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a vessel for PBN (pyrolytic boron nitride) even with a complicated structure or a large size, in high yield, by a CVD method, without causing deformation and fracture in the vessel. SOLUTION: The method for manufacturing the vessel for pyloritic boron nitride comprises depositing pyloritic boron nitride on a heat-resistant base material by a chemical vapor deposition method (a CVD method) and separating the deposited pyloritic boron nitride layer from the above base material, and is characterized by making a relationship of heat expansion coefficientαA of the heat-resistant base material and heat expansion coefficientαB in a vertical direction (a direction (a)) to the growth direction of pyloritic boron nitride to be 0.1×10<-6> / deg.C<(αA-αB)<2.0×10<-6> / deg.C.
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