SUBSTRATE-PROCESSING SYSTEM, SUBSTRATE-PROCESSING APPARATUS MANAGING METHOD, SUBSTRATE-PROCESSING APPARATUS, PROGRAM AND STORAGE MEANS

摘要

PROBLEM TO BE SOLVED: To provide a technique for efficiently managing the consumption degree of parts of a substrate processing apparatus. SOLUTION: The attrition rate of each part of the substrate-processing apparatus 1 is measured by measuring the use time of the part by a timer 117 or by counting the number of processed substrates using the part. The measured attrition rate of the parts is accumulated as attrition rate information 241, in a hard disk 24 of an information accumulating server 2. The information 241 is obtained from a supporting computer 3, and it is decided for each part, whether or not the consumption degree exceeds a prescribed value. If the resulted value exceeds the prescribed value, an alarming section 313 issues an alarm to urge replacement of the corresponding part, and a order placing signal transmission section 314 transmits an order placing signal for a new part for replacing the corresponding part to an order-placing server 8 of a part center 7.