发明名称 METHOD AND APPARATUS FOR MANUFACTURING SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a single crystal. SOLUTION: The single crystal is periodically rotated by rotating an angle of one set, and after the single crystal is rotated respectively at one set rotating angle, the rotating direction is inverted, and at this time, the inversion of the rotating direction defines the turning point on the region of the single crystal and at least one repeating pattern of the turning point arises, at which time the turning points are arranged in parallel with respect to a z-axis and exist distributively on a straight line by having specified intervals with each other. Accordingly, the growth of a desired cylindrical shape and the occurrence of a growth edge of a narrow width are assured as well and this method is applicable in an FZ method and CZ method as well.
申请公布号 JP2003112992(A) 申请公布日期 2003.04.18
申请号 JP20020221813 申请日期 2002.07.30
申请人 WACKER SILTRONIC AG 发明人 ALTMANNSHOFER LUDWIG
分类号 C30B13/30;C30B13/26;C30B15/22;C30B15/30;C30B29/06;(IPC1-7):C30B13/30 主分类号 C30B13/30
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