OPERATION CONTROL SYSTEM OF SEMICONDUCTOR MANUFACTURE- RELATED APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an operation control system of a semiconductor manufacture-related apparatus, which detects operation data, trouble information data, and the like by a portable information terminal in real time for displaying. SOLUTION: Collected operation data and the like on an apparatus and facilities in a factory A are stored into the database unit of a server 1 via a private branch communication network (LAN) 3, and are subjected to arithmetic processing by a data-collecting terminal 2 comprising a plurality of personal board computers 2a, 2b, and 2c. A terminal adapter (TA) 5 and a digital PBX6 are connected to the output side of the server 1. Further, information data on the apparatus and facilities from the server 1 are transmitted from the digital PBX6 via an information communication network 7. At the same time, a report for coping with troubles in the apparatus, facilities, and the like is outputted to the server 1 for displaying from a display terminal 9. Additionally, maintenance information and trouble history are inputted for storing to the server 1. Then, totalling processing is made on the Web screen of the display terminal 9 as needed for detecting and displaying a graph.