摘要 |
PROBLEM TO BE SOLVED: To use a laser beam as light for lighting a flaw inspection object, and to provide an image reflecting conscientiously unevenness in the inspection object. SOLUTION: A band width of the laser beam output from a semiconductor laser 5 is expanded by an optical fiber cable 7 constituted by bundling optical fibers having about 1 m of length, the band-width widened laser beam is emitted within a prescribed lighting range by a plurality of optical fibers 8 to light the flaw inspection object 2, and interference between the fellow laser beams emitted to the inspection object 2 is reduced to pick up the image reflecting conscientiously the unevenness in the inspecting object 2 by an image picking-up means 13.
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