INSTRUMENT AND METHOD FOR MEASURING THREE-DIMENSIONAL SHAPE AND THREE-DIMENSIONAL SHAPE SCANNING UNIT

摘要

PROBLEM TO BE SOLVED: To provide an instrument and method by which the shape of an object having a three-dimensional shape can be measured to a more minute level by preventing the deformation or breakage of the surface of the object at the time of measuring the shape. SOLUTION: The instrument which measures the shape of the object 30 having the three-dimensional shape has a scanning probe microscope 20 which measures the surface form of the object 30, a moving mechanism 21 which moves the microscope 20 relatively to the object 30 along the three-dimensional surface form of the object 30, and a processor 22 which processes the data about the three-dimensional shape of the object 30 measured by moving the microscope 20 along the three-dimensional surface form of the object 30.