| 摘要 |
A CONTAINER FOR CREATING A MICROENVIRONMENT IS DISCLOSED. THE CONTAINER INCLUDES A SHELL (10), A DOOR (90) AND A PLURALITY OF SUPPORTS (60, 62) HAVING A UNIQUE DESIGN WHICH ARE USED TO SECURELY RETAIN ITEMS, SUCH AS SILICON WAFERS (80), IN A SPACED APART PARALLEL RELATIONSHIP. THE SUPPORTS ARE REMOVABLE. AN ELECTRICAL PATH IS PROVIDED TO GROUND THE SUPPORTS (60, 62). KINEMATIC COUPLING STRUCTURE (40) ARE ALSO PROVIDED FOR POSITIONING THE CONTAINER ON A SURFACE SO AS TO, FOR EXAMPLE, PROPERLY ALIGN THE DOOR (90) WITH THE PORT OF A WAFER PROCESSING TOOL.
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