| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus, in which when slit scan development slit scan rinsing is performed, even if a rinse solution discharge nozzle is separated from the upper surface of a substrate and is moved horizontally, the rinse solution discharged from a slit-shaped discharge outlet is prevented from turning into shower. SOLUTION: A rinse solution 2 is discharged from a slit-shaped discharge outlet, in a state where the slit-shaped discharge outlet 18 of a rinse solution discharge nozzle is dipped in a rinse solution 16; the slit-shaped discharge outlet is exposed from the rinse solution, while discharging the rinse solution from the slit-shaped discharge outlet; and then the discharge of the rinse solution onto the substrate by the rinsed solution discharge nozzle is started. COPYRIGHT: (C)2003,JPO |
