| 摘要 |
PROBLEM TO BE SOLVED: To obtain a stable organo polysilica composition containing a B-staged organo polysilica resin and to provide a method for stabilizing such a B-staged organo polysilica resin composition and a method for manufacturing an electronic device using such as a stable composition. SOLUTION: This method for manufacturing an electronic device including forming a porous organo polysilica dielectric material comprises the steps of depositing on an electronic device substrate a stable composition including a B-staged organo polysilica resin, a porogen (pore forming substance) and an organic acid having two carbons or more and having a pKa of about 1 to about 4, wherein the composition is substantially free of alcohol of reaction, curing the B-staged organo polysilica resin to form an organo polysilica dielectric material and removing the porogen to provide a porous organo polysilica dielectric material deposited on the substrate. COPYRIGHT: (C)2003,JPO |
