| 摘要 |
PROBLEM TO BE SOLVED: To provide a device having a Q-factor that can be controlled with high accuracy, resulting in accuracy regarding its measurements, while seldom requiring a precise support circuit having resistance to vibration, impact and other external factors. SOLUTION: A method of manufacturing a multilayer micromechanical device is disclosed. The device has an inner cavity having a micromechanical component element therein. The method includes the step of forming the micromechanical component element from a layer of first material, the step of providing a seal layer on at least one surface of the first material to form the cavity, the step of providing a getter material inside the cavity, the step of sealing the first material to the seal layer through an anode connection, and the step of supplying an inert gas into the cavity to adjust pressure within the cavity. A corresponding device manufactured by the method is also disclosed. COPYRIGHT: (C)2003,JPO
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