| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost precision analyzing instrument capable of highly precisely and efficiently analyzing the precision of a machine tool including the perpendicularity of a main spindle axis and thermal displacement of the main spindle. SOLUTION: This precision analyzing instrument for the machine tool is provided with a laser oscillator 2 mounted on the main spindle 26 and irradiating a laser beam whose optic axis orthogonally crosses the main spindle axis, image pickup devices 5 and 8, at least, having a light receiving part 5 disposed adjacent to the laser oscillator 2, receiving the laser beam irradiated from the laser oscillator by the light receiving part 5 and creating two-dimensional image data, and an analyzer 15 analyzing the precision of the machine tool 20 on the basis of the obtained image data. COPYRIGHT: (C)2003,JPO
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