| 摘要 |
A device is described having a capacitor (200) with alterable capacitance C(U) for changing the impedance of a section of a coplanar waveguide, which may be used in particular as a high-frequency microswitch. A ground lead (110, 111) and a signal lead (120) interrupted by an electroconductive connection (121) which is self-supporting at least in some areas are provided, the capacitor (200) including the electroconductive connection (121) and an additional electroconductive connection (130) connected to the ground lead (110, 111). In addition a structure (150) connected to the electroconductive connection (121) is provided, which is designed in such a way that it reduces mechanical stresses which occur in the electroconductive connection (121). An additional embodiment of the device provides for the electroconductive connection (121) to be made of a material having coefficients of thermal expansion similar to that of silicon and a high modulus of elasticity compared to metals, in particular of molybdenum, tantalum or tungsten. Preferentially, the two embodiments are combined.
|
