| 摘要 |
PROBLEM TO BE SOLVED: To add another shape to a rugged shape already formed on a glass original disk by a resist film. SOLUTION: In exposure processing of the original disk coated with the resist, a thin-film containing fluorescent dyestuffs having prescribed wavelength characteristics is formed on the original disk and is subjected to exposure. The fluorescent dyestuffs having such characteristics that the fluorescent dyestuffs condense a laser beam onto the original disk coated with the resist, are excited by the wavelength of this laser beam to emit fluorescence and do not expose the resist at the wavelength of the generated fluorescence or such characteristics that the fluorescent dyestuffs condense the laser beam of the wavelength to prevent the resist from being exposed by this wavelength onto the original disk coated with the resist, do not generate the fluorescence by one photon excitation or do not expose the resist at the wavelength of the fluorescence in spite of the generation of such fluorescence, and expose the resist at the wavelength of the fluorescence generated by two photon excitation are used as the fluorescent dyestuffs. The fluorescence generated by such fluorescent elements is imaged and detected and is used for focus control, etc. COPYRIGHT: (C)2003,JPO |
