METHOD OF MANUFACTURING OPTICAL SWITCH

摘要

PROBLEM TO BE SOLVED: To provide a method of forming mirrors and moving sections with good accuracy. SOLUTION: A metallic film 31 is first formed on an Si layer 30c of an SOI substrate 30. Next, metallic patterns 32 having prescribed patterns are formed from the metallic film 31 by photolithography and etching. A resist film 33 is applied and formed on the Si layer 30c provided with the metallic patterns 32 and is provided with apertures 33a. In succession, the apertures 33a are filled with Ni by a plating process and thereafter the mirrors 9 are formed by removing the resist film 33. The Si layer 30c and a SiO2layer 30b are then etched by using the mirrors 9 and the metallic patterns 32 as a mask. As a result, comb teeth 8a and movable members 7 are formed and mirror devices 6a are obtained. COPYRIGHT: (C)2003,JPO