CHARACTERISTIC EVALUATION METHOD AND INSPECTION METHOD FOR FERROELECTRIC MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a new method for evaluating characteristics of a ferroelectric material which is capable of easily evaluating the characteristics of a micro region of ferroelectric material such as an LSI memory using the ferroelectric material as a memory medium with high resolution at a high speed. SOLUTION: The Raman shift frequency of Raman spectrum out of Raman spectra of the ferroelectric material corresponding to the soft mode of the ferroelectric material is directly proportional to the absolute value of the spontaneous polarization of the ferroelectric material. The intensity of the Raman spectrum corresponding to the soft mode is directly proportional to the quantity of an effective domain. The size of the spontaneous polarization is evaluated on the Raman shift frequency, and an effectively oriented domain occupation factor is evaluated on the Raman intensity. COPYRIGHT: (C)2004,JPO