| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment device capable of uniformly carrying out the heat treatment of a substrate even when using a plurality of flash heating means. SOLUTION: A heat treatment device is provided with a heating plate 74 for preliminarily heating a substrate W, and a plurality of xenon flash lamps 69 for raising the temperature of the preliminarily heated substrate W to a treatment temperature by irradiating the substrate W with a flash. At the time of carrying out heat treatment, the position of the substrate W is adjusted so that a distance between the surface of the substrate W and each xenon flash lamp 69 can be set so as to be 40 mm or more and 100 mm or less. COPYRIGHT: (C)2004,JPO
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