| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To uniformly form a short cycle and deep polarization reverse area on a large area of a substrate for manufacturing a high-efficiency and short- wavelength optical wavelength conversion element. <P>SOLUTION: A comb-shaped electrode is formed on the surface of a substrate, and a plane electrode is formed on the rear surface. Then, the DC voltage on which a pulse voltage is superimposed is applied to the electrodes using a DC power source and a pulse power source and a DC electric field on which a pulse electric field is superimposed is applied to the substrate. Thus, periodic domain-inverted region can be formed by applying even a small pulse electric field. Since the applied electric field is highly uniform a in surface of the substrate, the domain-inverted region having a uniform periodic structure are formed. Alternatively the comb-shaped electrode is covered with an insulating film, the pulse voltage is applied to the electrode using the pulse power source, and the pulse electric field is applied to the substrate. Thus, since movement of free charges in the surface of a crystal is suppressed, and the spread of domain inversion in a horizontal direction is inhibited, and a uniform short- periodic domain-inverted structure is formed. <P>COPYRIGHT: (C)2004,JPO</p> |
