HIGHER ORDER SILANE COMPOSITION AND PROCESS FOR FORMING SILICON FILM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To obtain a higher order silane composition which contains a higher order silane compound having a larger molecular weight from the viewpoint of wettability, boiling point and safety upon its application onto a substrate, and especially can easily form a high-quality silicon film, and a process for forming the excellent silicon film using the composition. SOLUTION: The higher order silane composition contains the higher order silane compound obtained by photopolymerizing a solution of a photopolymerizable silane compound or a photopolymerizable silane compound in a liquid state by exposing it to ultraviolet irradiation. In the process for forming the silicon film, the higher order silane composition is applied onto a substrate. COPYRIGHT: (C)2004,JPO