| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate cassette which prevents a foreign matter generated by the contact of a substrate with a center support from attaching to a substrate on a lower stage. SOLUTION: The substrate cassette includes a foreign matter removing aid means J comprising a support member 6 for supporting the center support 5 and equipped with a duct 6d communicating with an external exhaust port 7 and a suction port K provided around the support 5 and communicating with the duct 6d. COPYRIGHT: (C)2004,JPO |
