TEST EQUIPMENT OF SEMICONDUCTOR DEVICE

摘要

PURPOSE: A test equipment of a semiconductor device is provided to be capable of reducing process time by uniformly irradiating high intensity ultraviolet rays, when carrying out an erasing process under a write function test for the semiconductor device. CONSTITUTION: A test equipment of a semiconductor device is provided with a wafer chuck(110) for aligning a plurality of wafers(100) and an UV(UltraViolet) lamp(120) for irradiating ultraviolet rays to the wafers. The test equipment further includes a reflection plate part(230) for reinforcing the ultraviolet rays and an exhaust fan for emitting the heat generated from the ultraviolet ray irradiation. The reflection plate part includes the first reflectors(232), the second reflectors(233) connected with the first reflectors, and a heat releasing port.