| 摘要 |
<P>PROBLEM TO BE SOLVED: To precisely detect synchronously acceleration and angular velocity concurrently by simple constitution. <P>SOLUTION: A pair of oscillators is supported on a substrate to be displaced along XY-axis directions orthogonal each other, and vibrated X-axis-directionally. Y-axis-directional displacements of the respective oscillators are detected by capacity changes of capacitors C1-C4 (detecting electrode parts) to detect concurrently the Y-axis-directional acceleration acting on the substrate and the angular velocity around a Z-axis orthogonal to the XY axes. A time-division voltage signal is impressed to the capacitors C1-C4 by time-division control of a voltage impression circuit 71, a sampling timing control circuit 77 and sampling holding circuits 73-76, a pair of voltage signals for expressing same-directional displacements (acceleration) in the Y-axis direction of the respective oscillators is taken out based on a differential voltage, and a pair of voltage signals for expressing reverse-directional displacements (angular velocity) in the Y-axis direction of the respective oscillators is taken out based on the differential voltage, via a single charge amplifier 72. <P>COPYRIGHT: (C)2004,JPO |
