Method and apparatus for aligning an extraction electrode to an arc chamber

摘要

A method for aligning an extraction electrode to an arc chamber of an ion implantation apparatus can be carried out by first providing a calibration tool that is shaped essentially of a flat key that has sections of different widths. The extraction electrode can then be tilted by switching on a tilt motor, while being moved horizontally by switching on an alignment motor until the calibration tool can be smoothly inserted into the slit openings in the arc chamber and in the extraction electrode. The tilt motor and the alignment motor are controlled by a tilt/align controller. When such insertion is not possible, the extraction electrode can be continuously tilted and moved horizontally until such smooth insertion is possible. The present invention further discloses a calibration tool that can be used easily for aligning an extraction electrode to an arc chamber of an ion implantation apparatus.