| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a costless, highly reliable and precise liquid ejection head and its manufacturing process. <P>SOLUTION: A thermally crosslinked positive photosensitive material layer (first positive photosensitive material layer) and a second positive photosensitive material layer are formed on a substrate and then the second positive photosensitive material layer is patterned followed by patterning of the first positive photosensitive material layer. Subsequently, a negative resin for forming a channel wall is applied thereon and an ejection hole is made in the negative resin layer before the positive photosensitive material layer is removed. The first positive photosensitive material is an ionizing radiation decomposing positive resist of a methacryl-based copolymer composition containing methacrylic acid having methacrylic acid unit of 2-30 wt% and molecular weight of 5,000-50,000, and the second positive photosensitive material is an ionizing radiation decomposing positive resist principally comprising polymethylisopropenylketone. <P>COPYRIGHT: (C)2004,JPO |
