| 发明名称 |
Methods and furnaces for fused silica production |
| 摘要 |
Methods and apparatus for producing fused silica members having high internal transmission are disclosed. The apparatus and methods are capable of producing fused silica having internal transmission of at least 99.65%/cm at 193 nm.
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| 申请公布号 |
US6698248(B2) |
申请公布日期 |
2004.03.02 |
| 申请号 |
US20020247917 |
申请日期 |
2002.09.20 |
| 申请人 |
CORNING INCORPORATED |
发明人 |
MARLEY FLOYD E.;SEMPOLINSKI DANIEL R.;SPROUL MERRILL F. |
| 分类号 |
C03B20/00;C03B8/04;C03B19/14;(IPC1-7):C03B37/018 |
主分类号 |
C03B20/00 |
| 代理机构 |
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代理人 |
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