发明名称 |
ELECTRONIC DEVICE AND SUBSTRATE FOR THE SAME |
摘要 |
PURPOSE: To provide an electronic device of excellent characteristics that comprises a metal thin film and a functional thin film having a wurzite crystal structure of c-plane uni-orientation and high crystallinity on an Si(100) substrate. CONSTITUTION: The substrate for an electronic device comprises a metal thin film 4 which is a (111) alignment film of a face centered cubic structure or a (001) alignment film of a hexagonal close-packed structure, and a wurzite thin film 5 which is a (001) alignment film of wurzite structure. Both thin films are a polycrystal film containing at least two kinds of crystal particles with different crystal orientation in plane. If the metal thin film 4 is a (111) alignment film, <1-10> axis in the plane of metal thin film 4 is parallel to <11-20> axis in the plane of wurzite thin film 5. If the metal film 4 is a (0001) alignment film, <11-20> axis in the plane of metal thin film 4 is parallel to <11-20> axis in the plane of wurzite thin film 5. |
申请公布号 |
KR20040020024(A) |
申请公布日期 |
2004.03.06 |
申请号 |
KR20030060108 |
申请日期 |
2003.08.29 |
申请人 |
TDK CORPORATION |
发明人 |
NOGUCHI TAKAO;SAITOU HISATOSHI;ABE HIDENORI;YAMASHITA YOSHINARI |
分类号 |
C30B29/68;H01L21/20;H01L21/285;H01L21/3205;H01L21/365;H01L29/04;H01L41/08;H01L41/09;H01L41/18;H01L41/22;H01L41/29;H01L41/316;H01L41/319;H01L41/39;H03H3/02;H03H9/17 |
主分类号 |
C30B29/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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