发明名称 PRODUCTION OF HIGH-PURITY FLUORINE GAS AND METHOD FOR ANALYZING TRACE IMPURITIES IN HIGH-PURITY FLUORINE GAS
摘要 A step (1) of heating a fluoronickel compound to release a fluorine gas, a step (2) of allowing a fluorine gas to be occluded into a fluorinated compound, and a step (3) of heating the fluoronickel compound and reducing an inner pressure are conducted in a container, respectively, at least once, and thereafter a high-purity fluorine gas is obtained in the step (1). Also, a step (5) of heating a fluoronickel compound and reducing an inner pressure and a step (6) of allowing a fluorine gas reduced in a hydrogen fluoride content to be occluded into the fluoronickel compound are conducted in a container having a fluorinated layer formed on its surface, respectively, at least once, the step (5) is further conducted, and thereafter a fluorine gas containing impurity gases is contacted with the fluoronickel compound to fix and remove the fluorine gas, and the impurities are analyzed by gas chromatography.
申请公布号 EP1399382(A2) 申请公布日期 2004.03.24
申请号 EP20020738834 申请日期 2002.06.27
申请人 SHOWA DENKO K.K. 发明人 TORISU, JUNICHI;ATOBE, HITOSHI;HOSHINO, YASUYUKI
分类号 C01B7/20;C01G53/08;G01N21/03;G01N21/09;G01N21/35;G01N30/14;H01S3/036;H01S3/225 主分类号 C01B7/20
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