发明名称 |
ARRANGEMENT FOR DETERMINING THE SPECTRAL REFLECTIVITY OF A MEASURMENT OBJECT |
摘要 |
In an arrangement for determining the spectral reflectivity of a measurement object, the object of the invention is to provide a simpler and more compact measuring arrangement, to eliminate the removal of elements from the beam path for detecting the reference beam, which was formally necessary, an d to avoid complex translational and rotational movements. Different beam areas proceeding from the radiation source serve as measurement beam and reference beam which are directed simultaneously to different spectrally dispersing areas of at least one dispersive element and to different receiver areas of at least one receiver in a spectrograph. Preferred measurement objects are surfaces which reflect in a spectrally-dependent manner for radiation in the extreme ultraviolet range (EUV), but application of the arrangement is not limited to this spectral region.</ SDOAB>
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申请公布号 |
CA2442171(A1) |
申请公布日期 |
2004.03.26 |
申请号 |
CA20032442171 |
申请日期 |
2003.09.22 |
申请人 |
JENOPTIK MIKROTECHNIK GMBH |
发明人 |
MISSALLA, THOMAS;SCHUERMANN, MAX CHRISTIAN;SEHER, BERND |
分类号 |
G01N23/20;G01J3/18;G01N21/55;G01T1/36;(IPC1-7):G01N21/55 |
主分类号 |
G01N23/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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