| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment method capable of carrying out a uniform plasma treatment on a treated body in the plasma treatment by the use of an electrode equipped with a ceramic layer, even if the ceramic layer fitted to the electrode is under an environment in contact with an ambient air. <P>SOLUTION: With the plasma treatment method for carrying out a plasma treatment on a treated subject S with a plasma generated in a discharge space 10 formed between the opposing electrodes 2, 2 with the use of a discharge electrode 1 equipped with an opposing pair of opposing electrodes 2, 2 and ceramic layers 3, 3 fitted to opposing faces of the opposing electrodes 2, 2, the plasma treatment is started after the discharge electrode 1 is held at a temperature higher than room temperature by 10°C or more. <P>COPYRIGHT: (C)2004,JPO |
