| 摘要 |
<P>PROBLEM TO BE SOLVED: To eliminate abnormal discharge from the electrode of a plasma surface treating device and, at the same time, to make the maintenance of the device easier. <P>SOLUTION: The electric field impressing electrode 51 of the plasma surface treating device M1 which treats the surface of an object to be treated by ionizing a treating gas into a plasma by impressing an electric field upon the gas is provided with a main body 56 composed of a conductor, and a dielectric case 57 composed of a dielectric. The case 57 has a main body 57a which houses the main body 56 of the electrode 51 in its internal space opened on one side in a state where the main body 56 can be taken out of the space and a lid 57b closing the opening. <P>COPYRIGHT: (C)2004,JPO |
