发明名称 EXTRINSIC BASE DOPING FOR BIPOLAR JUNCTION TRANSISTORS
摘要 Device structure and fabrication methods for a bipolar junction transistor. A base layer is formed and an emitter is formed on a first portion of the base layer. A dopant-containing layer is deposited on a second portion of the base layer. Dopant is transferred from the dopant-containing layer into the second portion of the base layer to define an extrinsic base of the device structure.
申请公布号 US2016380055(A1) 申请公布日期 2016.12.29
申请号 US201514749836 申请日期 2015.06.25
申请人 International Business Machines Corporation 发明人 Camillo-Castillo Renata;Harame David L.;Liu Qizhi
分类号 H01L29/10;H01L21/324;H01L29/08;H01L21/225;H01L29/73;H01L29/66 主分类号 H01L29/10
代理机构 代理人
主权项 1. A method of fabricating a device structure, the method comprising: forming a base layer; forming an emitter on a first portion of the base layer; depositing a dopant-containing layer on a second portion of the base layer; and transferring dopant from the dopant-containing layer into the second portion of the base layer to define an extrinsic base of the device structure.
地址 Armonk NY US