| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a heating structure and a thermal sensor having high-reliability output characteristics. <P>SOLUTION: A tabular substrate in which an aperture is bored is formed, and a supporting film 4 is formed on the whole of the surface of the substrate 1. A heating resistor 6 of a specified pattern made of a platinum film is formed on the supporting film 4, and a protective film 5 is formed on the whole surface of the supporting film 4 so as to cover the heating resistor 6. By removing a part of the substrate 1 in such a way as to reach the supporting film 4 from the rear face side of the substrate 1, a cavity 2 is formed below the formation region of the heating resistor 6, and a heating structure 8A of a diaphragm section is formed. Each of the supporting film 4 and the protective film 5 is made of a silicon nitride film having a < 2.25 refractive index. <P>COPYRIGHT: (C)2004,JPO</p> |
