| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the drying of nozzles and reduce discarded resist. <P>SOLUTION: This resist coating equipment 10 is provided with the nozzles 11 which are arranged at a plurality of parts of one line in a process and used for switching, and a resist tank 12 for storing resist to be supplied to the nozzles 11. A slit-shaped output port is formed in the nozzle 11. In the middle of connection piping 13 which connects the resist tank 12 and the nozzle 11, an opening and closing valve 14 for opening and closing the piping 13 is arranged. In the piping 13, a switching valve 15 for supplying rinse to the nozzle 11 is arranged between the resist tank 12 and the valve 14. The switching valve 15 is formed so as to switch a state that the valve 14 is interconnected with the resist tank 12 and interconnection between the valve 14 and a rinse tank 17 is cut, and a state that the valve 14 is interconnected with the rinse tank 17 and interconnection between the valve 14 and the resist tank 12 is cut. <P>COPYRIGHT: (C)2004,JPO |
