发明名称 Device and method for individual support of components
摘要 A system is provided for individually supporting at least one component having opposing front and back faces, including a supporting device having a plurality of cells each delimited by a wall and having a contact zone to support the component, at least a part of the cells each receiving a component by its front face, the supporting and contact zones are configured so a surface of the front face is not in contact with the wall, the contact zone is located on a periphery of the front face and forms a closed zone around the front face, the supporting zone forms a closed zone on the wall, and the contact zone includes an edge surface set back in a thickness direction with respect to the front face, the thickness direction extending from the front to the back face perpendicular to at least one of the faces.
申请公布号 US9455174(B2) 申请公布日期 2016.09.27
申请号 US201313932451 申请日期 2013.07.01
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES 发明人 Sanchez Loic;Bally Laurent;Montmayeul Brigitte
分类号 H01L21/683;H01L21/673 主分类号 H01L21/683
代理机构 Oblon, McClelland, Maier & Neustadt, L.L.P. 代理人 Oblon, McClelland, Maier & Neustadt, L.L.P.
主权项 1. A system for individually supporting at least one component comprising a front face and a back face opposite the front face, the system comprising: a supporting device comprising a member configured to support the at least one component, the member being provided with a plurality of cells, each cell of the plurality of cells being delimited by a wall and including a zone configured to support a contact zone of the at least one component, at least a part of the plurality of cells each receiving a component by a front face thereof, the supporting zone and the contact zone being configured so that a surface of the front face of the at least one component is not in contact with the wall of said each cell, wherein the contact zone of the at least one component is located on a periphery of the front face and forms a closed zone around the front face, wherein the supporting zone forms a closed zone on the wall of said each cell, and wherein the contact zone of the at least one component includes an edge surface set back in a thickness direction with respect to the front face of the at least one component, the thickness direction extending from the front face to the back face and being perpendicular to at least one of the front face and the back face.
地址 Paris FR