METHOD FOR SETTING UP POSITION OF WAFER TRANSFER ARM

摘要

PURPOSE: A method for setting up a position of a wafer transfer arm is provided to set up easily a horizontal shift position of the wafer transfer arm by detecting correctly a loading position of a jig wafer. CONSTITUTION: A jig wafer is shifted to the predetermined direction by an arm in order to irradiate a beam into a hole of the jig wafer(S410). The first and the second horizontal positions of the arm are detected(S420). The jig wafer is shifted to a center of the first and the second horizontal positions by using the arm(S430). The jig wafer is shifted to the perpendicular direction to a straight line between the first and the second horizontal positions by using the arm(S440). The third horizontal position is detected(S450). The jig wafer is shifted to the opposite direction by using the arm(S460). The fourth horizontal position is detected(S470). A center between the third and the fourth horizontal positions is decided as a horizontal shift position of the arm(S480).