| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem in a conventional method wherein, when imaging an inspection object 1 with an X-ray irradiation axis at an angle in the case where the object is a stereoscopic object, it is difficult to perform X-ray tomographic inspection highly accurately because the image of the imaged inspection object is deformed. <P>SOLUTION: This method has a process for imaging by changing the angle of the X-ray irradiation axis with respect to the inspection object 1, a process for detecting the inspection position in the imaged image based on imaging object region information set beforehand, a process for comparing the same inspection position in a plurality of imaged images relative to each part, a process for selecting the compared partial images by a threshold, and a process for re-constituting the image from the selected partial images. Hereby, the X-ray tomographic inspection can be performed highly accurately. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
