| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a detection method and a detection apparatus of stain defects that have high detection output also for a defect having a low contract or a small size, automatically determine a threshold for detection as the stain defects, based on statistical brightness data in a detected image, and further achieve the quantitative evaluation of the detected stain defects. <P>SOLUTION: A screen to be inspected is imaged by a CCD camera 6, the difference between an image being captured by the imaging and a background image 14 that is created in advance is obtained to create an inspection image 15, the inspection image is flattened, reduced images in a plurality of stages are created from a flattened image 16, each of the reduced image is filtered for emphasizing defects, the statistical data of the brightness value of each pixel in an image 17 after filtering are calculated, a threshold is determined, based on the brightness statistical data, for judging the presence or absence of defect candidates, and the defect candidates are extracted from an image that is determined to have the defect candidates by using the threshold. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
