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发明名称
A SINGLE ELECTRON TUNNELING DEVICE AND A FABRICATING METHOD THEREOF
摘要
申请公布号
KR100446598(B1)
申请公布日期
2004.08.23
申请号
KR19970045812
申请日期
1997.09.04
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, BYEONG MAN;KIM, WON SIK;LEE, JO WON
分类号
H01L29/68;(IPC1-7):H01L29/68
主分类号
H01L29/68
代理机构
代理人
主权项
地址
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