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发明名称
半导体装置及其制造方法
摘要
在矽表面上所形成、具有实质(110)晶面方向的半导体装置中,其矽表面系被平坦化至表面算术平均偏差Ra不大于0.15nm的程度、且较佳的情况是0.09nm,以便制造出具有高迁移率的n–MOS电晶体。这种经过平坦化的矽表面系在充满氧自由基的空气中、藉由自牺牲氧化物膜之沈积制程与自牺牲氧化物膜之移除制程的重复进行,或在经过除气之H2O或低OH密度的空气中、藉由矽表面的清洗,或者藉由氢或重氢对矽表面进行强烈的终止反应,而加以获得。该自牺牲氧化物膜之沈积制程可藉由等向氧化法来实行。
申请公布号
TW200416862
申请公布日期
2004.09.01
申请号
TW092133823
申请日期
2003.12.02
申请人
大见忠弘
发明人
大见忠弘;须川成利;寺本章伸;赤堀浩史;二井启一
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
周良谋
主权项
地址
日本
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