发明名称 Detector array with scattered light correction
摘要 The subject invention relates to a method of mitigating the effects of spurious background signals in spectroscopic measurement systems. The design of a broadband imagining spectrometer is disclosed that enables direct measurement of the spurious optical background intensity during spectroscopic measurements of a sample. The background is measured on a two dimensional surface coincident with the spectrometer exit plane. The background contribution is used to correct the measurements improving the accuracy of the spectroscopic intensity measurement.
申请公布号 US6801309(B1) 申请公布日期 2004.10.05
申请号 US20020266808 申请日期 2002.10.08
申请人 THERMA-WAVE, INC. 发明人 NELSON STEVE
分类号 G01J3/28;(IPC1-7):G01J3/02 主分类号 G01J3/28
代理机构 代理人
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