| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating drying device capable of drying a substrate while suppressing unevenness in drying of a coating film formed on the substrate, even with respect to the substrate on a conveyance path.SOLUTION: A heating drying device for heating and drying a substrate on a conveyance path of a conveying device for conveying the substrate while floating by ultrasonic vibration, includes a heater portion for heating a coating film on a substrate, a chamber cover portion forming a chamber portion by being kept into contact with a vibration plate and keeping the substrate in the chamber portion in a sealed state, and an exhaust portion for exhausting the chamber portion. The chamber cover portion is provided with a top plate approaching the substrate on the vibration plate to be opposed to the entire surface of the substrate in a state in which the chamber cover portion is kept into contact with the vibration plate, and the exhaust portion dries the coating film on the substrate by heating the heater portion while exhausting the inside of the chamber portion from an exhaust port so as to keep the inside of the chamber portion into a low decompression state.SELECTED DRAWING: Figure 12 |
