发明名称 |
WIRING HAVING LOW RESISTANCE AND EXCELLENT CHEMICAL RESISTANCE FOR SEMICONDUCTOR DEVICE, METHOD FOR FABRICATING THE SAME, TFT DISPLAY PANEL INCLUDING THE SAME, AND METHOD FOR FABRICATING THE SAME |
摘要 |
PURPOSE: A wiring for semiconductor device, a method for fabricating the same, a TFT display panel including the same, and a method for fabricating the same are provided to prevent the corrosion of the wiring and minimize delay of signals by forming a self assembled mono-layer on a metal layer. CONSTITUTION: A metal layer(20) is formed on an upper surface of a substrate(10). The metal layer is formed with silver, gold, copper, and an alloy of the silver, the gold, and copper. A self assembled mono-layer(30) is formed on an upper surface of the metal layer. The self assembled mono-layer includes S and CH2.
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申请公布号 |
KR20040105975(A) |
申请公布日期 |
2004.12.17 |
申请号 |
KR20030037148 |
申请日期 |
2003.06.10 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHO, BEOM SEOK;JUNG, CHANG O;LEE, JAE GAP;SUNG, MYEONG MO;YANG, HUI JEONG |
分类号 |
H01L21/768;H01L;(IPC1-7):H01L21/768 |
主分类号 |
H01L21/768 |
代理机构 |
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主权项 |
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地址 |
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