发明名称 WIRING HAVING LOW RESISTANCE AND EXCELLENT CHEMICAL RESISTANCE FOR SEMICONDUCTOR DEVICE, METHOD FOR FABRICATING THE SAME, TFT DISPLAY PANEL INCLUDING THE SAME, AND METHOD FOR FABRICATING THE SAME
摘要 PURPOSE: A wiring for semiconductor device, a method for fabricating the same, a TFT display panel including the same, and a method for fabricating the same are provided to prevent the corrosion of the wiring and minimize delay of signals by forming a self assembled mono-layer on a metal layer. CONSTITUTION: A metal layer(20) is formed on an upper surface of a substrate(10). The metal layer is formed with silver, gold, copper, and an alloy of the silver, the gold, and copper. A self assembled mono-layer(30) is formed on an upper surface of the metal layer. The self assembled mono-layer includes S and CH2.
申请公布号 KR20040105975(A) 申请公布日期 2004.12.17
申请号 KR20030037148 申请日期 2003.06.10
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO, BEOM SEOK;JUNG, CHANG O;LEE, JAE GAP;SUNG, MYEONG MO;YANG, HUI JEONG
分类号 H01L21/768;H01L;(IPC1-7):H01L21/768 主分类号 H01L21/768
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