FILM COATING APPARATUS AND METHOD FOR FORMING UNIFORM FILM ON SUBSTRATE USING ANTI-DRYING PLATE

摘要

PURPOSE: A film coating apparatus and method are provided to form a uniform film on a substrate by controlling a dried state of a predetermined solution coated on the substrate using an anti-drying plate. CONSTITUTION: A film coating apparatus includes a substrate holding/supporting part, a nozzle, a driving part and an anti-drying plate. The nozzle(4) is used for discharging a coating solution to a substrate(W) of the substrate holding/supporting part. The driving part moves the substrate holding/supporting part to and fro, so that the nozzle seems to be relatively moved from front to rear. The anti-drying plate(6a,6b) is used for covering completely a coating solution discharged portion of the substrate. The anti-drying plate is spaced apart from the substrate as much as 2 mm or less.