SUSCEPTOR AND A METHOD FOR MANUFACTURING THE SAME CAPABLE OF CONTINUOUSLY USING WITHOUT A BREAKDOWN WHEN THE TEMPERATURE RISES OR FALLS

摘要

PURPOSE: A susceptor and a method for manufacturing the same are provided to continuously use without a breakdown when the temperature rises or falls and to manufacture a low cost. CONSTITUTION: An upper end(212) of a susceptor shaft(210) is combined with the bottom center of the susceptor body(200) and then sealed through a welding process(216). Inserting grooves(222) are symmetrically formed at a region adjacent to the center of bottom surface(200a) of the susceptor body and a region adjacent to the peripheral region, respectively. A heater(220) is received to the inserting grooves. A cover(224) made of aluminum material is additionally mounted to lower ends of the inserting grooves.