| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-cost positive photoresist composition for a system LCD, the composition having excellent linearity, high resolution, and DOF (depth of focus) characteristics, excellent property of suppressing degassing and heat resistance, and preferably, durable for mass consumption, and to provide a method for forming a resist pattern by using the above composition. <P>SOLUTION: The positive photoresist composition comprises (A) an alkali-soluble resin component or (A') an alkali-insoluble or alkali hardly soluble resin component which is converted into alkali-soluble by the effect of an acid. The resin component is obtained by refining in an ion exchange resin prior to being used for the preparation of the resist composition. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
