发明名称 |
FILM PATTERN FORMING METHOD, DEVICE AND ITS MANUFACTURING METHOD, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a film pattern forming method by which a narrow film pattern can be formed precisely and stably. <P>SOLUTION: The method has a process of forming a bank B on a substrate P and a process of shooting liquid drops of functional liquid L on the substrate P and locating the functional liquid L to a region A divided by the bank B. An impact interval h of the liquid drops shot is an interval in which the liquid drops are connected in the region A after the impact. At the impact position of the liquid drops in the edge of the region A, a distance Le from the edge of the region A is not longer than one half of the impact interval h of the liquid drops. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
申请公布号 |
JP2005012173(A) |
申请公布日期 |
2005.01.13 |
申请号 |
JP20040095975 |
申请日期 |
2004.03.29 |
申请人 |
SEIKO EPSON CORP |
发明人 |
MIKOSHIBA TOSHIAKI |
分类号 |
G02F1/1368;B05D1/26;B05D5/12;B05D7/00;B41J2/14;C23C4/12;C23C26/02;G02F1/1345;G09F9/00;H01L21/28;H01L21/288;H01L21/3205;H01L21/336;H01L21/768;H01L29/786;H01L51/00;H01L51/40;H01L51/50;H05B33/10;H05K3/12;(IPC1-7):H01L21/288;H05B33/14;H01L21/320;G02F1/136 |
主分类号 |
G02F1/1368 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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