| 摘要 |
The present invention relates to an oxide sintered body having a perovskite structure represented with a chemical formula of MRuO3 (M: one or more types among Ca, Sr, Ba), characterized in that the total content of alkali metals such as Na, K, and Fe, Ni, Co, Cr, Cu, Al is 100 ppm or less, the content of respective elements U, Th is 10 ppb or less, and the relative density is 90% or more, and provides an oxide sintered body and the manufacturing method thereof having a pervoskite structure represented with the chemical formula MRuO3 (M: one or more types among Ca, Sr, Ba) by using a MRuO3 sintered body raw material refined to a high density of 4N or more, which enables sintering at low temperatures, and which is capable of obtaining a high-density sintered body.
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